Unprecedented Measurement, Design, and Control of MEMS

 

 

Measurement

 A self-calibratable MEMS device. the Capacitance chip has attofarad resolution, which corresponds to sub-nanometer accuracy in measuring overetch geometry. Then accurate measurements of Displacement, stiffness, and comb force are determined at once with the same relative error.

A self-calibratable MEMS device. the Capacitance chip has attofarad resolution, which corresponds to sub-nanometer accuracy in measuring overetch geometry. Then accurate measurements of Displacement, stiffness, and comb force are determined at once with the same relative error.

Electro Micro Metrology (EMM) is the only technology capable of true self-calibration for micro or nano electro-mechanical systems. EMM enables MEMS to comprehensively and autonomously measure their own geometric, dynamic, and material properties without external test equipment, without externally applied disturbances, and without in-factory calibration. Due to the scaling laws of EMM physics, the technology is only applicable at the micro scale or below.

EMM  

Design

 Frequency response manifold. The ability to sweep an arbitrary number of parameters is just one of many unique features in the tool for exploring design spaces.

Frequency response manifold. The ability to sweep an arbitrary number of parameters is just one of many unique features in the tool for exploring design spaces.

Sugarcube is the only online computer aided design CAD tool for MEMS. It uses parameterized compact models to facilitate design exploration. Unique attributes include: online access via cloud computing, novice-friendly user interface, bounded parameter sliders, growing library of ready-made systems, N-dimensional simulations, single-click combinatorial layout arrays, minimization of performance variation due to process variation, compact models of carbon nanotubes (CNT), evolutionary design optimization using genetic algorithms and programming, etc., as well as user-guided development of new features.  

Sugarcube  ›

Control

 Simulation of PODMEMS demonstrating desired changes in resonance frequency of a single MEMS device by state-feedback. Resonance is shown increased and decreased by a factor of 2. Feedback Circuit delay, noise, and process variations were also modeled, for simulations to emulate realistic responses.

Simulation of PODMEMS demonstrating desired changes in resonance frequency of a single MEMS device by state-feedback. Resonance is shown increased and decreased by a factor of 2. Feedback Circuit delay, noise, and process variations were also modeled, for simulations to emulate realistic responses.

Performance On Demand MEMS (PODMEMS) is the only technology able to dynamically increase or decrease the effective mass, damping, and stiffness of packaged MEMS. The technology extends the performance of MEMS beyond conventional constraints. PODMEMS senses its movement and feeds back forces that are proportional to its displacement, velocity, and acceleration, which enables control of its apparent stiffness, damping, and mass. Due to scaling laws, PODMEMS is only applicable at the micro scale or below.

PODMEMS  ›